Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8809196 | Method of etching a thin film using pressure modulation | — | 2014-08-19 |
| 8435901 | Method of selectively etching an insulation stack for a metal interconnect | — | 2013-05-07 |
| 8252192 | Method of pattern etching a dielectric film while removing a mask layer | Yao-Sheng Lee, Vaidyanathan Balasubramaniam, Masaru Nishino | 2012-08-28 |
| 7637269 | Low damage method for ashing a substrate using CO2/CO-based process | Masaru Nishino, Chong Hwan Chu, Yannick Feurprier | 2009-12-29 |
| 7622390 | Method for treating a dielectric film to reduce damage | Shin Okamoto | 2009-11-24 |