Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7637269 | Low damage method for ashing a substrate using CO2/CO-based process | Kelvin Zin, Masaru Nishino, Yannick Feurprier | 2009-12-29 |
| 6783626 | Treatment and evaluation of a substrate processing chamber | Nam Hun Kim | 2004-08-31 |