Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10923332 | Plasma processing method | Ryuichi Asako, Masahiro Tabata | 2021-02-16 |
| 10903085 | Method for etching organic region | Ryuichi Asako, Masahiro Tabata | 2021-01-26 |
| 10861675 | Plasma processing apparatus and plasma processing method | Hirofumi Haga, Shinichi Kozuka, Wataru Ozawa, Akihiro Sakamoto, Naoki Taniguchi +2 more | 2020-12-08 |
| 10734204 | Method for cleaning components of plasma processing apparatus | Ryuichi Asako | 2020-08-04 |
| 10626497 | Method for cleaning components of plasma processing apparatus | Ryuichi Asako | 2020-04-21 |
| 10204763 | Plasma processing apparatus and plasma processing method | Hirofumi Haga, Shinichi Kozuka, Wataru Ozawa, Akihiro Sakamoto, Naoki Taniguchi +2 more | 2019-02-12 |
| 9779962 | Plasma etching method | Shinichi Kozuka, Yuta Seya, Aritoshi Mitani | 2017-10-03 |
| 9653317 | Plasma processing method and plasma processing apparatus | Masaru Nishino, Shinichi Kozuka, Ryosuke Niitsuma, Tsutomu Ito | 2017-05-16 |