Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10707088 | Method of processing target object | Shinya Morikita, Takanori BANSE, Ryosuke Niitsuma | 2020-07-07 |
| 10692726 | Method for processing workpiece | Shinya Morikita, Takanori BANSE, Ryosuke Niitsuma | 2020-06-23 |
| 9779962 | Plasma etching method | Takao FUNAKUBO, Shinichi Kozuka, Aritoshi Mitani | 2017-10-03 |
| 9177823 | Plasma etching method and plasma etching apparatus | — | 2015-11-03 |