Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861675 | Plasma processing apparatus and plasma processing method | Takao FUNAKUBO, Shinichi Kozuka, Wataru Ozawa, Akihiro Sakamoto, Naoki Taniguchi +2 more | 2020-12-08 |
| 10276405 | Plasma processing apparatus | Akinori Miyata, Shigeru Senzaki, Nobutaka Nakao | 2019-04-30 |
| 10204763 | Plasma processing apparatus and plasma processing method | Takao FUNAKUBO, Shinichi Kozuka, Wataru Ozawa, Akihiro Sakamoto, Naoki Taniguchi +2 more | 2019-02-12 |
| 9984907 | Evacuation method and vacuum processing apparatus | Nobutaka Nakao, Hideaki Yakushiji | 2018-05-29 |