Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10276405 | Plasma processing apparatus | Shigeru Senzaki, Hirofumi Haga, Nobutaka Nakao | 2019-04-30 |
| 9134105 | Contour shape measurement method | — | 2015-09-15 |
| 9016106 | Contact type shape measuring apparatus | — | 2015-04-28 |
| 8755052 | Shape measuring method | Masayuki Ono | 2014-06-17 |