Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8757089 | Coating and developing apparatus, coating and developing method, and storage medium | Hideharu Kyouda | 2014-06-24 |
| 8163469 | Coating and developing apparatus, coating and developing method, and storage medium | Hideharu Kyouda | 2012-04-24 |
| 8010221 | Cleaning apparatus and method for immersion light exposure | Masashi Enomoto, Hideharu Kyouda | 2011-08-30 |