Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7582414 | Method and system for drying a substrate | Kathleen Nafus, Kaz Yoshioka, Richard Yamaguchi | 2009-09-01 |
| 7070915 | Method and system for drying a substrate | Kathleen Nafus, Kaz Yoshioka, Richard Yamaguchi | 2006-07-04 |
| 6586160 | Method for patterning resist | Bernard J. Roman, Chong-Cheng Fu | 2003-07-01 |