TA

Tohru Azuma

TL Tokyo Electron Limited: 3 patents #2,069 of 5,567Top 40%
Overall (All Time): #1,380,042 of 4,157,543Top 35%
3
Patents All Time

Issued Patents All Time

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
12151255 Coating apparatus and coating method Hideki Kajiwara, Yuya Yonemitsu, Shinichiro YAMANAKA, Shinichi MIZUSHINO, Naruaki Iida +1 more 2024-11-26
11752515 Coating apparatus and coating method Hideki Kajiwara, Yuya Yonemitsu, Shinichiro YAMANAKA, Shinichi MIZUSHINO, Naruaki Iida +1 more 2023-09-12
10643872 Liquid processing apparatus, liquid processing method, and storage medium Masahiro Abe, Hiroichi Inada, Tsunenaga Nakashima, Naofumi Kishita, Hideki Kajiwara 2020-05-05