Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8845815 | Liquid processing apparatus, liquid processing method, and computer-readable recording medium having program stored therein | Terufumi Wakiyama | 2014-09-30 |
| 8840752 | Flow passage switching apparatus, processing apparatus, flow passage switching method, processing method and storage medium | Shuichi Nagamine, Kenji Kiyota | 2014-09-23 |
| 8808798 | Coating method | Takahiro Kitano, Koichi Obata, Hiroichi Inada | 2014-08-19 |
| 8758855 | Coating film forming apparatus, use of coating film forming apparatus, and recording medium | Hiroichi Inada, Taro Yamamoto, Akihiro Fujimoto | 2014-06-24 |
| 8551563 | Coating method | Takahiro Kitano, Koichi Obata, Hiroichi Inada | 2013-10-08 |
| 8539906 | Substrate liquid processing apparatus | Shuichi Nagamine | 2013-09-24 |
| 8354141 | Liquid treatment apparatus, mounting and dismounting method of a cup body, and storage medium | Tsunenaga Nakashima, Gouichi Iwao, Naofumi Kishita | 2013-01-15 |
| 8256370 | Coating apparatus and method | Takahiro Kitano, Koichi Obata, Hiroichi Inada | 2012-09-04 |
| 8225737 | Coating apparatus and method | Takahiro Kitano, Koichi Obata, Hiroichi Inada | 2012-07-24 |
| 8186298 | Coating film forming apparatus, use of coating film forming apparatus, and recording medium | Hiroichi Inada, Taro Yamamoto, Akihiro Fujimoto | 2012-05-29 |
| 7984690 | Liquid treatment apparatus, mounting and dismounting method of a cup body, and storage medium | Tsunenaga Nakashima, Gouichi Iwao, Naofumi Kishita | 2011-07-26 |
| 7976896 | Method of processing a substrate and apparatus processing the same | Yoshiteru Fukuda, Takayuki Ishii, Keiji Tanouchi | 2011-07-12 |