Issued Patents All Time
Showing 26–50 of 86 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7593625 | Fluid heating apparatus | Mikio Nakashima, Osamu Tsuda | 2009-09-22 |
| 7412981 | Liquid processing apparatus and method | Koji Egashira | 2008-08-19 |
| 7404409 | Substrate processing system and substrate processing method | — | 2008-07-29 |
| 7347214 | Rotary shaft sealing mechanism and liquid processing apparatus | Koji Egashira, Masaki Taira | 2008-03-25 |
| 7337792 | Liquid processing apparatus and liquid processing method | Shori Mukuo | 2008-03-04 |
| 7314054 | Liquid processing apparatus with nozzle having planar ejecting orifices | Koji Egashira | 2008-01-01 |
| 7284560 | Liquid processing apparatus | — | 2007-10-23 |
| 7191785 | Substrate processing apparatus for resist film removal | Takayuki Toshima, Kinya Ueno, Miyako Yamasaka, Hideyuki Tsutsumi, Tadashi Iino | 2007-03-20 |
| 6895979 | Processing apparatus and processing method | Kyouji Kohama, Eiji Shimbo, Takayuki Toshima, Hiroki Ohno | 2005-05-24 |
| 6861371 | Substrate processing system and substrate processing method | Eiichi Mukai | 2005-03-01 |
| 6799586 | Substrate processing method | Kouji Egashira, Koji Tanaka | 2004-10-05 |
| 6792958 | System for processing substrate with liquid | — | 2004-09-21 |
| 6776173 | Liquid processing apparatus | — | 2004-08-17 |
| 6746543 | Apparatus for and method of cleaning objects to be processed | Satoshi Nakashima, Kinya Ueno | 2004-06-08 |
| 6743297 | Rotary substrate processing apparatus and method | Koji Egashira, Sadayuki Fujishima | 2004-06-01 |
| 6725868 | Liquid processing apparatus | Koji Egashira | 2004-04-27 |
| 6708702 | Liquid processing apparatus with storage tank having an internal and external tank | — | 2004-03-23 |
| 6698439 | Processing apparatus with sealing mechanism | Koji Egashira | 2004-03-02 |
| 6647642 | Liquid processing apparatus and method | Taichi Sakaguchi | 2003-11-18 |
| 6613692 | Substrate processing method and apparatus | Takayuki Toshima, Kinya Ueno, Miyako Yamasaka, Hideyuki Tsutsumi, Tadashi Iino | 2003-09-02 |
| 6592678 | Cleaning method and cleaning equipment | Naoki Shindo, Shigenori Kitahara, Miyako Yamasaka | 2003-07-15 |
| 6589359 | Cleaning method and cleaning apparatus for substrate | Hiroshi Tanaka | 2003-07-08 |
| 6578592 | Processing apparatus with horizontally movable enclosing element | Takehiko Orii, Kyouji Kohama | 2003-06-17 |
| 6575178 | Cleaning and drying method and apparatus | — | 2003-06-10 |
| 6536452 | Processing apparatus and processing method | Kyouji Kohama, Eiji Shimbo, Takayuki Toshima, Hiroki Ohno | 2003-03-25 |