Issued Patents All Time
Showing 76–86 of 86 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6045624 | Apparatus for and method of cleaning objects to be processed | Satoshi Nakashima, Kinya Ueno | 2000-04-04 |
| 6029371 | Drying treatment method and apparatus | Teruomi Minami, Shigenori Kitahara | 2000-02-29 |
| 6009890 | Substrate transporting and processing system | Satoshi Kaneko, Akira Koguchi, Osamu Kuroda, Shigenori Kitahara, Tatsuya Nishida | 2000-01-04 |
| 5940985 | Apparatus and method for drying substrates | Kinya Ueno | 1999-08-24 |
| 5922138 | Liquid treatment method and apparatus | Naoki Shindo, Miyako Yamasaka | 1999-07-13 |
| 5862823 | Substrate cleaning method and a substrate cleaning apparatus | Naoki Shindo | 1999-01-26 |
| 5488964 | Washing apparatus, and washing method | Shinya Murakami, Sinichiro Izumi, Noriyuki Anai, Takami Satoh, Hirofumi Shiraishi +3 more | 1996-02-06 |
| 5381808 | Cleaning treatment apparatus | — | 1995-01-17 |
| 5248022 | Driving device having sealing mechanism | Mitsuo Nishi | 1993-09-28 |
| 5226437 | Washing apparatus | Masafumi Inoue, Mitsuo Nishi | 1993-07-13 |
| 5213118 | Treatment apparatus | — | 1993-05-25 |