Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7355379 | Coaxial type impedance matching device and impedance detecting method for plasma generation | Toshiaki Kitamura, Shigeru Kasai, Takashi Ogino, Yuki Osada | 2008-04-08 |
| 7176634 | Coaxial type impedance matching device and impedance detecting method for plasma generation | Toshiaki Kitamura, Shigeru Kasai, Takashi Ogino, Yuki Osada | 2007-02-13 |
| 6856211 | Coaxial type impedance matching device | Fumio Yamada, Toshiaki Kitamura, Hiroyuki Kobayashi, Akihiro Kubota, Shigeru Kasai +2 more | 2005-02-15 |
| 6819052 | Coaxial type impedance matching device and impedance detecting method for plasma generation | Toshiaki Kitamura, Shigeru Kasai, Takashi Ogino, Yuki Osada | 2004-11-16 |