Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6856211 | Coaxial type impedance matching device | Fumio Yamada, Toshiaki Kitamura, Hiroyuki Kobayashi, Koichi Rokuyama, Akihiro Kubota +2 more | 2005-02-15 |
| 6819052 | Coaxial type impedance matching device and impedance detecting method for plasma generation | Toshiaki Kitamura, Koichi Rokuyama, Shigeru Kasai, Takashi Ogino | 2004-11-16 |