Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12365985 | Deposition apparatus with pressure sensor and shower head on same plane and deposition method | Tsuneyuki Okabe | 2025-07-22 |
| 12024776 | Gas supply apparatus, gas supply method, and substrate processing apparatus | — | 2024-07-02 |
| 9224623 | Microwave irradiation apparatus | Shigeru Kasai, Ryoji Yamazaki, Mitsutoshi ASHIDA, Sumi Tanaka | 2015-12-29 |