Issued Patents All Time
Showing 51–63 of 63 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5711850 | Plasma processing apparatus | Tomohiro Okumura, Yoshihiro Yanagi | 1998-01-27 |
| 5693236 | Water-repellent surface structure and its fabrication method | Tomohiro Okumura, Chikako Goto, Tadashi Imai | 1997-12-02 |
| 5609690 | Vacuum plasma processing apparatus and method | Syouzou Watanabe, Masaki Suzuki, Tomohiro Okumura | 1997-03-11 |
| 5558722 | Plasma processing apparatus | Tomohiro Okumura, Yoshihiro Yanagi | 1996-09-24 |
| 5502953 | Method for transporting/storing a wafer in a wafer carrier | Masuo Tanno, Kazuhiro Mori | 1996-04-02 |
| 5436424 | Plasma generating method and apparatus for generating rotating electrons in the plasma | Noboru Nomura, Tokuhiko Tamaki, Mitsuhiro Okuni, Masafumi Kubota | 1995-07-25 |
| 5424905 | Plasma generating method and apparatus | Noboru Nomura, Kenji Harafuji, Masafumi Kubota, Tokuhiko Tamaki, Mitsuhiro Ohkuni | 1995-06-13 |
| 5404079 | Plasma generating apparatus | Mitsuhiro Ohkuni, Masafumi Kubota, Noboru Nomura, Tokuhiko Tamaki | 1995-04-04 |
| 5360106 | Method for transporting/storing wafer and wafer carrier | Masuo Tanno, Kazuhiro Mori | 1994-11-01 |
| 5332880 | Method and apparatus for generating highly dense uniform plasma by use of a high frequency rotating electric field | Masafumi Kubota, Kenji Harafuji, Tokuhiko Tamaki, Mitsuhiro Ohkuni, Noboru Nomura | 1994-07-26 |
| 4937205 | Plasma doping process and apparatus therefor | Bunji Mizuno, Masabumi Kubota, Masuo Tanno | 1990-06-26 |
| 4912065 | Plasma doping method | Bunji Mizuno, Masafumi Kubota, Masuo Tanno | 1990-03-27 |
| 4906464 | Method for preparing dispersions containing antibiotic power | Tatuo Yamamoto, Masashi Uchida, Yasuo Kurihara | 1990-03-06 |