Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6844264 | Dry etching method | — | 2005-01-18 |
| 5436424 | Plasma generating method and apparatus for generating rotating electrons in the plasma | Ichiro Nakayama, Noboru Nomura, Tokuhiko Tamaki, Masafumi Kubota | 1995-07-25 |
| 5057689 | Scanning electron microscope and a method of displaying cross sectional profiles using the same | Noboru Nomura, Hideo Nakagawa, Taichi Koizumi, Kenji Harafuji, Norimichi Anazawa | 1991-10-15 |