Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7409309 | Method of deciding the quality of the measurement value by the edge width | Jun Nitta, Katuyuki Takahashi | 2008-08-05 |
| 7375328 | Charged particle beam apparatus and contamination removal method therefor | Akira Yonezawa, Tatenori Jinriki, Jun Nitta, Ryuichi Shimizu | 2008-05-20 |
| 6686591 | Apparatus for inspecting mask | Minoru Ito | 2004-02-03 |
| 5057689 | Scanning electron microscope and a method of displaying cross sectional profiles using the same | Noboru Nomura, Hideo Nakagawa, Taichi Koizumi, Kenji Harafuji, Mitsuhiro Okuni | 1991-10-15 |
| 4488045 | Metal ion source | Masahiko Okunuki, Ryuzo Aihara | 1984-12-11 |