Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12172663 | Warning device utilizing azimuth angles of vehicles | Masahide UNNO | 2024-12-24 |
| 8574972 | Method for fabricating semiconductor device and plasma doping apparatus | Yuichiro Sasaki, Shigenori Hayashi | 2013-11-05 |
| 8216922 | Plasma doping method | Shigenori Hayashi, Yuichiro Sasaki | 2012-07-10 |
| 7800181 | Semiconductor device and method for fabricating the same | Yasutoshi Okuno, Michikazu Matsumoto, Seiji Ueda, Hiroshi Iwai, Kazuo Tsutsui +1 more | 2010-09-21 |
| 7144761 | Semiconductor device and method for fabricating the same | Hideo Nakagwa, Eiji Tamaoka, Tetsuya Ueda | 2006-12-05 |
| 7094639 | Method for fabricating semiconductor device | Shigenori Hayashi | 2006-08-22 |
| 6812101 | Semiconductor device and method for manufacture thereof | Masaru Moriwaki, Masaaki Niwa | 2004-11-02 |
| 6734451 | Aggregate of semiconductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the same | Koji Eriguchi, Masaaki Niwa, Noboru Nomura | 2004-05-11 |
| 6667246 | Wet-etching method and method for manufacturing semiconductor device | Riichiro Mitsuhashi, Shigenori Hayashi | 2003-12-23 |
| 6489629 | Aggregate of semiconductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the same | Koji Eriguchi, Masaaki Niwa, Noboru Nomura | 2002-12-03 |
| 6210593 | Etching method and etching apparatus | Mitsuhiro Ohkuni | 2001-04-03 |
| 6177291 | Method of making aggregate of semiconductor micro-needles | Koji Eriguchi, Masaaki Niwa, Noboru Nomura | 2001-01-23 |
| 6087197 | Aggregate of semiconductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the same | Koji Eriguchi, Masaaki Niwa, Noboru Nomura | 2000-07-11 |
| 6033928 | Method of manufacturing aggregate of semiconductor micro-needles | Koji Eriguchi, Masaaki Niwa, Noboru Nomura | 2000-03-07 |
| 5928528 | Plasma treatment method and plasma treatment system | Shigenori Hayashi, Michinari Yamanaka, Kenji Harafuji | 1999-07-27 |
| 5869402 | Plasma generating and processing method and apparatus thereof | Kenji Harafuji | 1999-02-09 |
| 5753066 | Plasma source for etching | Noboru Nomura, Tokuhiko Tamaki | 1998-05-19 |
| 5593539 | Plasma source for etching | Noboru Nomura, Tokuhiko Tamaki | 1997-01-14 |
| 5436424 | Plasma generating method and apparatus for generating rotating electrons in the plasma | Ichiro Nakayama, Noboru Nomura, Tokuhiko Tamaki, Mitsuhiro Okuni | 1995-07-25 |
| 5424905 | Plasma generating method and apparatus | Noboru Nomura, Kenji Harafuji, Tokuhiko Tamaki, Mitsuhiro Ohkuni, Ichiro Nakayama | 1995-06-13 |
| 5404079 | Plasma generating apparatus | Mitsuhiro Ohkuni, Noboru Nomura, Ichiro Nakayama, Tokuhiko Tamaki | 1995-04-04 |
| 5345145 | Method and apparatus for generating highly dense uniform plasma in a high frequency electric field | Kenji Harafuji, Mitsuhiro Ohkuni, Tokuhiko Tamaki, Noboru Nomura | 1994-09-06 |
| 5332880 | Method and apparatus for generating highly dense uniform plasma by use of a high frequency rotating electric field | Kenji Harafuji, Tokuhiko Tamaki, Mitsuhiro Ohkuni, Noboru Nomura, Ichiro Nakayama | 1994-07-26 |
| 5330606 | Plasma source for etching | Noboru Nomura, Tokuhiko Tamaki | 1994-07-19 |
| 5324388 | Dry etching method and dry etching apparatus | Atsuhiro Yamano, Kenji Harafuji | 1994-06-28 |