Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7494827 | Plasma etching method and plasma etching apparatus | Keiichi Matsunaga | 2009-02-24 |
| 7268083 | Plasma etching apparatus and plasma etching process | — | 2007-09-11 |
| 6582551 | Apparatus for plasma etching having rotating coil responsive to slide valve rotation | — | 2003-06-24 |
| 6409877 | Apparatus and method for plasma etching | — | 2002-06-25 |
| 6355183 | Apparatus and method for plasma etching | — | 2002-03-12 |
| 6274502 | Method for plasma etching | — | 2001-08-14 |
| 6210593 | Etching method and etching apparatus | Masafumi Kubota | 2001-04-03 |
| 6187688 | Pattern formation method | Shunsuke Kugo, Tomoyuki Sasaki, Kenji Tateiwa, Hideo Nikoh | 2001-02-13 |
| 5424905 | Plasma generating method and apparatus | Noboru Nomura, Kenji Harafuji, Masafumi Kubota, Tokuhiko Tamaki, Ichiro Nakayama | 1995-06-13 |
| 5404079 | Plasma generating apparatus | Masafumi Kubota, Noboru Nomura, Ichiro Nakayama, Tokuhiko Tamaki | 1995-04-04 |
| 5345145 | Method and apparatus for generating highly dense uniform plasma in a high frequency electric field | Kenji Harafuji, Tokuhiko Tamaki, Masafumi Kubota, Noboru Nomura | 1994-09-06 |
| 5332880 | Method and apparatus for generating highly dense uniform plasma by use of a high frequency rotating electric field | Masafumi Kubota, Kenji Harafuji, Tokuhiko Tamaki, Noboru Nomura, Ichiro Nakayama | 1994-07-26 |