Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5312776 | Method of preventing the corrosion of metallic wirings | Tomoyasu Murakami, Michinari Yamanaka, Kousaku Yano, Masayuki Endo, Noboru Nomura +3 more | 1994-05-17 |
| 5259922 | Drying etching method | Atsuhiro Yamano, Tokuhiko Tamaki, Kenji Harafuji, Noboru Nomura | 1993-11-09 |
| 5170098 | Plasma processing method and apparatus for use in carrying out the same | Robert W. Dutton | 1992-12-08 |
| 4997786 | Method of fabricating a semiconductor device having buried insulation layer separated by ditches | Bunji Mizuno | 1991-03-05 |
| 4912065 | Plasma doping method | Bunji Mizuno, Ichiro Nakayama, Masuo Tanno | 1990-03-27 |
| 4845048 | Method of fabricating semiconductor device | Tokuhiko Tamaki | 1989-07-04 |
| 4837172 | Method for removing impurities existing in semiconductor substrate | Bunji Mizuno | 1989-06-06 |