Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5502953 | Method for transporting/storing a wafer in a wafer carrier | Ichiro Nakayama, Kazuhiro Mori | 1996-04-02 |
| 5360106 | Method for transporting/storing wafer and wafer carrier | Ichiro Nakayama, Kazuhiro Mori | 1994-11-01 |
| 4937205 | Plasma doping process and apparatus therefor | Ichiro Nakayama, Bunji Mizuno, Masabumi Kubota | 1990-06-26 |
| 4912065 | Plasma doping method | Bunji Mizuno, Masafumi Kubota, Ichiro Nakayama | 1990-03-27 |
| 4906347 | Dry-etching apparatus | Kazuyuki Tomita, Yasuo Tanaka | 1990-03-06 |
| 4678539 | Dry-etching method | Kazuyuki Tomita | 1987-07-07 |
| 4612099 | Reactive ion etching method | Yuichiro Yamada | 1986-09-16 |