Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8110495 | Multilayer wiring structure of semiconductor device, method of producing said multilayer wiring structure and semiconductor device to be used for reliability evaluation | Shinichi Domae, Hiroshi Masuda, Yoshiaki Kato | 2012-02-07 |
| 7911060 | Multilayer wiring structure of semiconductor device, method of producing said multilayer wiring structure and semiconductor device to be used for reliability evaluation | Shinichi Domae, Hiroshi Masuda, Yoshiaki Kato | 2011-03-22 |
| 7642654 | Multilayer wiring structure of semiconductor device, method of producing said multilayer wiring structure and semiconductor to be used for reliability evaluation | Shinichi Domae, Hiroshi Masuda, Yoshiaki Kato | 2010-01-05 |
| 7443031 | Multilayer wiring structure of semiconductor device, method of producing said multilayer wiring structure and semiconductor device to be used for reliability evaluation | Shinichi Domae, Hiroshi Masuda, Yoshiaki Kato | 2008-10-28 |
| 7148572 | Multilayer wiring structure of semiconductor device, method of producing said multilayer wiring structure and semiconductor device to be used for reliability evaluation | Shinichi Domae, Hiroshi Masuda, Yoshiaki Kato | 2006-12-12 |
| 6815338 | Multilayer wiring structure of semiconductor device, method of producing said multilayer wiring structure and semiconductor device to be used for reliability evaluation | Shinichi Domae, Hiroshi Masuda, Yoshiaki Kato | 2004-11-09 |
| 6580176 | Multilayer wiring structure of semiconductor device, method of producing said multilayer wiring structure and semiconductor device to be used for reliability evaluation | Shinichi Domae, Hiroshi Masuda, Yoshiaki Kato | 2003-06-17 |
| 6372928 | Layer forming material and wiring forming method | Akemi Kawaguchi, Yuka Terai | 2002-04-16 |
| 6197685 | Method of producing multilayer wiring device with offset axises of upper and lower plugs | Shinichi Domae, Hiroshi Masuda, Yoshiaki Kato | 2001-03-06 |
| 6022804 | Semiconductor device and its manufacturing method | Tetauya Ueda | 2000-02-08 |
| 5986313 | Semiconductor device comprising MISFETS and method of manufacturing the same | Tetsuya Ueda, Takashi Uehara, Satoshi Ueda | 1999-11-16 |
| 5863338 | Apparatus and method for forming thin film | Yuichiro Yamada, Naoki Suzuki, Ryuzo Houchin, Noboru Nomura, Yuka Terai | 1999-01-26 |
| 5834369 | Method of preventing diffusion between interconnect and plug | Tomoyasu Murakami | 1998-11-10 |
| 5773639 | Layer forming material and wiring forming method | Akemi Kawaguchi, Yuka Terai | 1998-06-30 |
| 5760429 | Multi-layer wiring structure having varying-sized cutouts | Tetsuya Ueda | 1998-06-02 |
| 5753536 | Semiconductor device and associated fabrication method | Tatsuo Sugiyama, Shuji Hirao, Noboru Nomura | 1998-05-19 |
| 5733812 | Semiconductor device with a field-effect transistor having a lower resistance impurity diffusion layer, and method of manufacturing the same | Tetsuya Ueda, Takashi Uehara, Satoshi Ueda | 1998-03-31 |
| 5723909 | Semiconductor device and associated fabrication method | Tatsuo Sugiyama, Satoshi Ueda, Noboru Nomura | 1998-03-03 |
| 5714400 | Method for forming a memory device by utilizing variations in resistance value | Shuji Hirao, Hideko Okada | 1998-02-03 |
| 5633211 | Semiconductor device and process | Shinichi Imai, Yuka Terai, Masanori Fukumoto, Hiroyuki Umimoto, Shinji Odanaka +1 more | 1997-05-27 |
| 5621247 | Memory device with tungsten and aluminum interconnects | Shuji Hirao, Hideko Okada | 1997-04-15 |
| 5576247 | Thin layer forming method wherein hydrophobic molecular layers preventing a BPSG layer from absorbing moisture | Masayuki Endo, Yuka Terai, Noboru Nomura, Tomoyasu Murakami, Tetsuya Ueda +1 more | 1996-11-19 |
| 5569628 | Semiconductor device fabrication method | Tomoyasu Murakami, Masayuki Endo, Noboru Nomura | 1996-10-29 |
| 5545919 | Semiconductor device and method of fabricating the same | Satoshi Ueda, Tetsuya Ueda, Atsuhiro Yamano | 1996-08-13 |
| 5501739 | Apparatus and method for forming thin film | Yuichiro Yamada, Naoki Suzuki, Ryuzo Houchin, Noboru Nomura, Yuka Terai | 1996-03-26 |