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Semiconductor device with dummy conductors |
Susumu Matsumoto |
2008-10-07 |
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Semiconductor device |
Hisashi Ogawa, Isao Miyanaga, Takayuki Yamada, Kazuichiro Itonaga, Yoshihiro Mori |
2005-12-13 |
| 6849470 |
APPARATUS AND METHOD FOR OPTICAL EVALUATION, APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF CONTROLLING APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE |
Takayuki Yamada, Masanori Okuyama |
2005-02-01 |
| 6750976 |
Device for manufacturing semiconductor device and method of manufacturing the same |
— |
2004-06-15 |
| 6734069 |
Method of forming a high dielectric constant insulating film and method of producing semiconductor device using the same |
— |
2004-05-11 |
| 6734451 |
Aggregate of semiconductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the same |
Masafumi Kubota, Masaaki Niwa, Noboru Nomura |
2004-05-11 |
| 6727108 |
APPARATUS AND METHOD FOR OPTICAL EVALUATION, APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF CONTROLLING APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE |
Takayuki Yamada, Masanori Okuyama |
2004-04-27 |
| 6720790 |
Method and apparatus for evaluating insulating film |
Yukiko Hashimoto, Akio Watakabe |
2004-04-13 |
| 6695947 |
Device for manufacturing semiconductor device and method of manufacturing the same |
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2004-02-24 |
| 6583640 |
Method and apparatus for evaluating insulating film |
Yukiko Hashimoto, Akio Watakabe |
2003-06-24 |
| 6580091 |
APPARATUS AND METHOD FOR OPTICAL EVALUATION, APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF CONTROLLING APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE |
Takayuki Yamada, Masanori Okuyama |
2003-06-17 |
| 6489629 |
Aggregate of semiconductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the same |
Masafumi Kubota, Masaaki Niwa, Noboru Nomura |
2002-12-03 |
| 6469535 |
Method for examining semiconductor substrate, and method for controlling fabrication process of semiconductor devices |
Kyoko Egashira |
2002-10-22 |
| 6395563 |
Device for manufacturing semiconductor device and method of manufacturing the same |
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2002-05-28 |
| 6372082 |
Method and apparatus for semiconductor device fabrication |
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2002-04-16 |
| 6177291 |
Method of making aggregate of semiconductor micro-needles |
Masafumi Kubota, Masaaki Niwa, Noboru Nomura |
2001-01-23 |
| 6113733 |
Apparatus and method for optical evaluation, apparatus and method for manufacturing semiconductor device, method of controlling apparatus for manufacturing semiconductor device, and semiconductor device |
Takayuki Yamada, Masanori Okuyama |
2000-09-05 |
| 6087197 |
Aggregate of semiconductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the same |
Masafumi Kubota, Masaaki Niwa, Noboru Nomura |
2000-07-11 |
| 6069090 |
Method and apparatus for semiconductor device fabrication |
— |
2000-05-30 |
| 6033928 |
Method of manufacturing aggregate of semiconductor micro-needles |
Masafumi Kubota, Masaaki Niwa, Noboru Nomura |
2000-03-07 |
| 5985032 |
Semiconductor manufacturing apparatus |
— |
1999-11-16 |
| 5903031 |
MIS device, method of manufacturing the same, and method of diagnosing the same |
Takayuki Yamada, Takashi Nakabayashi, Masatoshi Arai, Toshiki Yabu |
1999-05-11 |
| 5897378 |
Method of monitoring deposit in chamber, method of plasma processing, method of dry-cleaning chamber, and semiconductor manufacturing apparatus |
— |
1999-04-27 |
| 5898207 |
Method for making a semiconductor device |
Michihiko Takase, Bunji Mizuno, Masatoshi Arai |
1999-04-27 |
| 5650336 |
Method of presuming life time of semiconductor device |
Yukiharu Uraoka |
1997-07-22 |
