Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7432556 | Semiconductor device with dummy conductors | Susumu Matsumoto | 2008-10-07 |
| 6974987 | Semiconductor device | Hisashi Ogawa, Isao Miyanaga, Takayuki Yamada, Kazuichiro Itonaga, Yoshihiro Mori | 2005-12-13 |
| 6849470 | APPARATUS AND METHOD FOR OPTICAL EVALUATION, APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF CONTROLLING APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE | Takayuki Yamada, Masanori Okuyama | 2005-02-01 |
| 6750976 | Device for manufacturing semiconductor device and method of manufacturing the same | — | 2004-06-15 |
| 6734069 | Method of forming a high dielectric constant insulating film and method of producing semiconductor device using the same | — | 2004-05-11 |
| 6734451 | Aggregate of semiconductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the same | Masafumi Kubota, Masaaki Niwa, Noboru Nomura | 2004-05-11 |
| 6727108 | APPARATUS AND METHOD FOR OPTICAL EVALUATION, APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF CONTROLLING APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE | Takayuki Yamada, Masanori Okuyama | 2004-04-27 |
| 6720790 | Method and apparatus for evaluating insulating film | Yukiko Hashimoto, Akio Watakabe | 2004-04-13 |
| 6695947 | Device for manufacturing semiconductor device and method of manufacturing the same | — | 2004-02-24 |
| 6583640 | Method and apparatus for evaluating insulating film | Yukiko Hashimoto, Akio Watakabe | 2003-06-24 |
| 6580091 | APPARATUS AND METHOD FOR OPTICAL EVALUATION, APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF CONTROLLING APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE | Takayuki Yamada, Masanori Okuyama | 2003-06-17 |
| 6489629 | Aggregate of semiconductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the same | Masafumi Kubota, Masaaki Niwa, Noboru Nomura | 2002-12-03 |
| 6469535 | Method for examining semiconductor substrate, and method for controlling fabrication process of semiconductor devices | Kyoko Egashira | 2002-10-22 |
| 6395563 | Device for manufacturing semiconductor device and method of manufacturing the same | — | 2002-05-28 |
| 6372082 | Method and apparatus for semiconductor device fabrication | — | 2002-04-16 |
| 6177291 | Method of making aggregate of semiconductor micro-needles | Masafumi Kubota, Masaaki Niwa, Noboru Nomura | 2001-01-23 |
| 6113733 | Apparatus and method for optical evaluation, apparatus and method for manufacturing semiconductor device, method of controlling apparatus for manufacturing semiconductor device, and semiconductor device | Takayuki Yamada, Masanori Okuyama | 2000-09-05 |
| 6087197 | Aggregate of semiconductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the same | Masafumi Kubota, Masaaki Niwa, Noboru Nomura | 2000-07-11 |
| 6069090 | Method and apparatus for semiconductor device fabrication | — | 2000-05-30 |
| 6033928 | Method of manufacturing aggregate of semiconductor micro-needles | Masafumi Kubota, Masaaki Niwa, Noboru Nomura | 2000-03-07 |
| 5985032 | Semiconductor manufacturing apparatus | — | 1999-11-16 |
| 5903031 | MIS device, method of manufacturing the same, and method of diagnosing the same | Takayuki Yamada, Takashi Nakabayashi, Masatoshi Arai, Toshiki Yabu | 1999-05-11 |
| 5897378 | Method of monitoring deposit in chamber, method of plasma processing, method of dry-cleaning chamber, and semiconductor manufacturing apparatus | — | 1999-04-27 |
| 5898207 | Method for making a semiconductor device | Michihiko Takase, Bunji Mizuno, Masatoshi Arai | 1999-04-27 |
| 5650336 | Method of presuming life time of semiconductor device | Yukiharu Uraoka | 1997-07-22 |