Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7790478 | Manufacturing method of semiconductor integrated circuit device | Kazuyuki Fujii, Gen Kawaharada, Masakazu Taki, Mutsumi Tsuda | 2010-09-07 |
| 6929712 | Plasma processing apparatus capable of evaluating process performance | Keiichi Sugahara, Toshihiko Noguchi, Toshio Komemura, Masakazu Taki, Mutumi Tuda +1 more | 2005-08-16 |
| 6864982 | Gas analyzing method and gas analyzer for semiconductor treater | Toshiki Oono | 2005-03-08 |
| 6416618 | Wafer processing apparatus | Masaaki Tsuchihashi, Hideki Oura | 2002-07-09 |
| 6287980 | Plasma processing method and plasma processing apparatus | Takayuki Ikushima, Kenji Shirakawa, Shinji Yamaguchi, Masakazu Taki | 2001-09-11 |
| 6273023 | Plasma processing apparatus capable of reliably, electrostatically attracting and holding and thus fixing semiconductor wafer | Masaaki Tsuchihashi | 2001-08-14 |
| 6218196 | Etching apparatus, etching method, manufacturing method of a semiconductor device, and semiconductor device | Hirotoshi Ise, Takayuki Ikushima, Nobuhiro Nishizaki | 2001-04-17 |
| 6109208 | Plasma generating apparatus with multiple microwave introducing means | Masaaki Tsuchihashi, Toshio Komemura, Mutumi Tuda, Kouichi Ono, Kouji Oku +1 more | 2000-08-29 |
| 6054016 | Magnetically enhanced microwave plasma generating apparatus | Mutumi Tuda, Kouichi Ono, Masaaki Tsuchihashi, Toshio Komemura, Kouji Oku +1 more | 2000-04-25 |
| 6033780 | Fine particles of petaloid porous hydroxyapatite and process for producing the same | Hidehiko Nishioka, Shigeo Takiyama | 2000-03-07 |
| 6024105 | Semiconductor manufacturing device and method of removing particles therefrom | Masaaki Tsuchihashi | 2000-02-15 |
| 5976687 | Additive for synthetic resins and a synthetic resin composition | Hidehiko Nishioka, Shiro Minayoshi, Shigeo Takiyama, Mitsunobu Aoyama | 1999-11-02 |
| 5844022 | Additive for synthetic resins and synthetic resin compositions | Hidehiko Nishioka, Shiro Minayoshi, Shigeo Takiyama, Mitsunobu Aoyama | 1998-12-01 |
| 5494651 | Method for manufacturing monodisperse vaterite type calcium carbonate | Shiro Minayoshi, Naofumi Saito, Hidehiko Nishioka, Sakae Kuroda, Masako Takahashi +2 more | 1996-02-27 |
| 5275651 | Monodisperse vaterite type calcium carbonate, its manufacturing method and method of controlling growth of particles and shape thereof | Shiro Minayoshi, Naofumi Saito, Hidehiko Nishioka, Sakae Kuroda, Masako Takahashi +2 more | 1994-01-04 |
| 4947085 | Plasma processor | Koichiro Nakanishi, Hiroki Ootera, Toshihiko Minami | 1990-08-07 |
| 4894510 | Apparatus for uniformly distributing plasma over a substrate | Koichiro Nakanishi, Hiroki Ootera, Toshihiko Minami | 1990-01-16 |
| 4725318 | Filler for paper-making and neutral paper-making process by the use thereof | Shiro Minayoshi, Naofumi Saitoh, Hiroyuki Hisakuni, Noritsugu Ebisuya | 1988-02-16 |