Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6929712 | Plasma processing apparatus capable of evaluating process performance | Minoru Hanazaki, Keiichi Sugahara, Toshio Komemura, Masakazu Taki, Mutumi Tuda +1 more | 2005-08-16 |
| 6768542 | Defect inspecting device for substrate to be processed and method of manufacturing semiconductor device | Hirotoshi Ise, Toshiki Oono, Yasuhiro Kimura, Toshio Komemura, Masato Toyota | 2004-07-27 |
| 6648128 | Conveyor, method for conveying a semiconductor wafer, and method for manufacturing a semiconductor device | Toshihiro Yamashita, Toshio Komemura | 2003-11-18 |
| 5976260 | Semiconductor producing apparatus, and wafer vacuum chucking device, gas cleaning method and nitride film forming method in semiconductor producing apparatus | Yoshimi Kinoshita, Tomoyuki Kanda, Katsuhisa Kitano, Kazuo Yoshida, Hiroshi Ohnishi +9 more | 1999-11-02 |
| 5534073 | Semiconductor producing apparatus comprising wafer vacuum chucking device | Yoshimi Kinoshita, Tomoyuki Kanda, Katsuhisa Kitano, Kazuo Yoshida, Hiroshi Ohnishi +9 more | 1996-07-09 |
| 5196034 | Semiconductor wafer cleaning apparatus | Toshiki Ono, Shiro Yamasaki | 1993-03-23 |