Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6768542 | Defect inspecting device for substrate to be processed and method of manufacturing semiconductor device | Hirotoshi Ise, Toshiki Oono, Yasuhiro Kimura, Toshio Komemura, Toshihiko Noguchi | 2004-07-27 |
| 5679204 | Plasma apparatus | Masayuki Kobayashi, Kiyoshi Maeda, Hiroshi Ohnishi, Hiroshi Tanaka, Toshio Komemura +1 more | 1997-10-21 |