Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6929712 | Plasma processing apparatus capable of evaluating process performance | Minoru Hanazaki, Keiichi Sugahara, Toshihiko Noguchi, Masakazu Taki, Mutumi Tuda +1 more | 2005-08-16 |
| 6768542 | Defect inspecting device for substrate to be processed and method of manufacturing semiconductor device | Hirotoshi Ise, Toshiki Oono, Yasuhiro Kimura, Masato Toyota, Toshihiko Noguchi | 2004-07-27 |
| 6648128 | Conveyor, method for conveying a semiconductor wafer, and method for manufacturing a semiconductor device | Toshihiro Yamashita, Toshihiko Noguchi | 2003-11-18 |
| 6347655 | Die bonding device and semiconductor device | Masahiko Yamamoto, Masahiro Ishitsuka | 2002-02-19 |
| 6109208 | Plasma generating apparatus with multiple microwave introducing means | Masaaki Tsuchihashi, Minoru Hanazaki, Mutumi Tuda, Kouichi Ono, Kouji Oku +1 more | 2000-08-29 |
| 6054016 | Magnetically enhanced microwave plasma generating apparatus | Mutumi Tuda, Kouichi Ono, Masaaki Tsuchihashi, Minoru Hanazaki, Kouji Oku +1 more | 2000-04-25 |
| 5679204 | Plasma apparatus | Masayuki Kobayashi, Kiyoshi Maeda, Masato Toyota, Hiroshi Ohnishi, Hiroshi Tanaka +1 more | 1997-10-21 |
| 4775085 | Semiconductor wafer breaking apparatus | Masahiro ISHIZUKA, Ichiro Hayashi | 1988-10-04 |