Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6929712 | Plasma processing apparatus capable of evaluating process performance | Minoru Hanazaki, Keiichi Sugahara, Toshihiko Noguchi, Toshio Komemura, Masakazu Taki +1 more | 2005-08-16 |
| 6651678 | Method of manufacturing semiconductor device | Kenji Shintani, Junji Tanimura, Takahiro Maruyama, Ryoichi Yoshifuku | 2003-11-25 |
| 6335595 | Plasma generating apparatus | Kazuyasu Nishikawa, Hiroki Ootera | 2002-01-01 |
| 6109208 | Plasma generating apparatus with multiple microwave introducing means | Masaaki Tsuchihashi, Minoru Hanazaki, Toshio Komemura, Kouichi Ono, Kouji Oku +1 more | 2000-08-29 |
| 6054016 | Magnetically enhanced microwave plasma generating apparatus | Kouichi Ono, Masaaki Tsuchihashi, Minoru Hanazaki, Toshio Komemura, Kouji Oku +1 more | 2000-04-25 |