Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6787874 | Semiconductor device | — | 2004-09-07 |
| 6756312 | Method of fabricating a semiconductor device including time-selective etching process | Kenji Shintani, Mutsumi Tsuda, Masakazu Taki | 2004-06-29 |
| 6417111 | Plasma processing apparatus | Kazuyasu Nishikawa, Tatsuo Oomori | 2002-07-09 |
| 6335595 | Plasma generating apparatus | Kazuyasu Nishikawa, Mutumi Tuda | 2002-01-01 |
| 6244211 | Plasma processing apparatus | Kazuyasu Nishikawa, Tatsuo Oomori | 2001-06-12 |
| 6167835 | Two chamber plasma processing apparatus | Masakazu Taki, Kenji Shintani, Kazuyasu Nishikawa | 2001-01-02 |
| 6076483 | Plasma processing apparatus using a partition panel | Kenji Shintani, Masakazu Taki, Kazuyasu Nishikawa | 2000-06-20 |
| 6020570 | Plasma processing apparatus | Masakazu Taki, Tatsuo Oomori, Kazuyasu Nishikawa, Kenji Shintani | 2000-02-01 |
| 5733405 | Plasma processing apparatus | Masakazu Taki, Tatsuo Oomori | 1998-03-31 |
| 5146138 | Plasma processor | Mutsumi Tsuda | 1992-09-08 |
| 5115167 | Plasma processor | Mutsumi Tsuda | 1992-05-19 |
| 4947085 | Plasma processor | Koichiro Nakanishi, Minoru Hanazaki, Toshihiko Minami | 1990-08-07 |
| 4894510 | Apparatus for uniformly distributing plasma over a substrate | Koichiro Nakanishi, Minoru Hanazaki, Toshihiko Minami | 1990-01-16 |