Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8338298 | Method and apparatus for manufacturing semiconductor integrated circuit device | Kazuyuki Fujii, Hideaki Kanazawa | 2012-12-25 |
| 5425812 | Reaction chamber for a chemical vapor deposition apparatus and a chemical vapor deposition apparatus using such a reaction chamber | Koichiro Tsutahara, Toru Yamaguchi, Taizo Ejima, Yoshinobu Kawata | 1995-06-20 |
| 5338363 | Chemical vapor deposition method, and chemical vapor deposition treatment system and chemical vapor deposition apparatus therefor | Yoshinobu Kawata | 1994-08-16 |
| 5077238 | Method of manufacturing a semiconductor device with a planar interlayer insulating film | Atsuhiro Fujii, Hideki Genjo | 1991-12-31 |
| 4947085 | Plasma processor | Koichiro Nakanishi, Hiroki Ootera, Minoru Hanazaki | 1990-08-07 |
| 4894510 | Apparatus for uniformly distributing plasma over a substrate | Koichiro Nakanishi, Hiroki Ootera, Minoru Hanazaki | 1990-01-16 |
| 4669071 | Photo sensor device and optical pickup device | Isao Umezawa, Kenji Shintani | 1987-05-26 |