Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5445677 | Apparatus for manufacturing semiconductor and method of manufacturing semiconductor | Toshinobu Banjo | 1995-08-29 |
| 5425812 | Reaction chamber for a chemical vapor deposition apparatus and a chemical vapor deposition apparatus using such a reaction chamber | Koichiro Tsutahara, Toru Yamaguchi, Taizo Ejima, Toshihiko Minami | 1995-06-20 |
| 5338363 | Chemical vapor deposition method, and chemical vapor deposition treatment system and chemical vapor deposition apparatus therefor | Toshihiko Minami | 1994-08-16 |
| 4932353 | Chemical coating apparatus | Katsunori Fuchigami | 1990-06-12 |