Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5425812 | Reaction chamber for a chemical vapor deposition apparatus and a chemical vapor deposition apparatus using such a reaction chamber | Koichiro Tsutahara, Toru Yamaguchi, Toshihiko Minami, Yoshinobu Kawata | 1995-06-20 |