Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7989283 | Manufacturing method of semiconductor device | Shinichi Yamanari, Masaaki Shinohara, Takahiro Maruyama, Kenji Kawai, Yusaku Hirota | 2011-08-02 |
| 6825118 | Method of manufacturing semiconductor device having trench element-isolating structure | Takahiro Maruyama | 2004-11-30 |
| 6740598 | Wiring layer dry etching method and semiconductor device manufacturing method | Kenji Kawai, Atsunori Nishiura | 2004-05-25 |
| 6651678 | Method of manufacturing semiconductor device | Kenji Shintani, Mutumi Tuda, Junji Tanimura, Takahiro Maruyama | 2003-11-25 |