Issued Patents All Time
Showing 51–66 of 66 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9799495 | Plasma processing apparatus and plasma processing method | Bunji Miizuno, Tomohiro Okumura | 2017-10-24 |
| 9786472 | Plasma processing apparatus and method for manufacturing electronic component | Tetsuhiro Iwai, Syouzou Watanabe | 2017-10-10 |
| 9780021 | Method of manufacturing element chip, method of manufacturing electronic component-mounted structure, and electronic component-mounted structure | Atsushi Harikai, Noriyuki Matsubara | 2017-10-03 |
| 9698052 | Method of manufacturing element chip and method of manufacturing electronic component-mounted structure using plasma etch to singulate element chip | Atsushi Harikai, Noriyuki Matsubara | 2017-07-04 |
| 9698073 | Method of manufacturing element chip and element chip | Atsushi Harikai, Noriyuki Matsubara, Mitsuru Hiroshima, Mitsuhiro Okune | 2017-07-04 |
| 9620336 | Plasma processing apparatus and method therefor | — | 2017-04-11 |
| 9570272 | Plasma processing apparatus and plasma processing method | Atsushi Harikai, Noriyuki Matsubara | 2017-02-14 |
| 9502220 | Plasma processing apparatus and plasma processing method | Bunji Mizuno, Tomohiro Okumura | 2016-11-22 |
| 9073385 | Plasma processing method for substrates | Ryota Furukawa, Yoshimasa Inamoto, Tatsuhiro Mizukami | 2015-07-07 |
| 8883025 | Plasma processing apparatus and plasma processing method | Yasuhiro Onishi | 2014-11-11 |
| 8673166 | Plasma processing apparatus and plasma processing method | Hiromi Asakura, Syouzou Watanabe, Toshihiro Wada, Mitsuhiro Okune, Mitsuru Hiroshima | 2014-03-18 |
| 8591754 | Plasma processing apparatus and plasma processing method | Hiromi Asakura, Syouzou Watanabe, Ryuzou Houchin, Hiroyuki Suzuki | 2013-11-26 |
| 8563332 | Wafer reclamation method and wafer reclamation apparatus | Gaku Sugahara, Hiroyuki Suzuki, Ryuzou Houchin, Mitsuru Hiroshima | 2013-10-22 |
| 8303765 | Plasma etching apparatus | Syouzou Watanabe, Hiroyuki Suzuki, Ryuuzou Houtin | 2012-11-06 |
| 8231798 | Plasma processing apparatus and plasma processing method | Hiromi Asakura, Syouzou Watanabe, Ryuzou Houchin, Hiroyuki Suzuki | 2012-07-31 |
| 7736528 | Plasma processing apparatus and plasma processing method | Hiromi Asakura, Syouzou Watanabe, Ryuzou Houchin, Hiroyuki Suzuki | 2010-06-15 |