Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9073385 | Plasma processing method for substrates | Shogo Okita, Ryota Furukawa, Yoshimasa Inamoto | 2015-07-07 |
| 8956499 | Plasma processing device | Kiyoshi Arita, Masaru Nonomura | 2015-02-17 |
| 8668836 | Plasma processing device and method of monitoring plasma discharge state in plasma processing device | Kiyoshi Arita, Masaru Nonomura | 2014-03-11 |
| 8585862 | Plasma processing device and plasma discharge state monitoring device | Kiyoshi Arita, Masaru Nonomura | 2013-11-19 |
| 8237367 | Plasma treatment apparatus and plasma treatment method | Masaru Nonomura | 2012-08-07 |