Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8058585 | Plasma processing method, plasma processing apparatus and storage medium | Hiroki Amemiya, Hiroshi Nagahata | 2011-11-15 |
| 7297635 | Processing method | Kazuto Ogawa | 2007-11-20 |
| 6299722 | Etching equipment including a post processing apparatus for removing a resist film, polymer, and impurity layer from an object | — | 2001-10-09 |
| 5858878 | Semiconductor wafer etching method and post-etching process | — | 1999-01-12 |
| 5385624 | Apparatus and method for treating substrates | Yutaka Amemiya | 1995-01-31 |
| 5147493 | Plasma generating apparatus | Eiichi Nishimura, Kazuhiko Sugiyama, Yukio Naitou | 1992-09-15 |