Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10081090 | Method of manufacturing an upper electrode of a plasma processing device | Tsuguo KITAJIMA | 2018-09-25 |
| 7480087 | Apparatus for and method of forming images with oscillation mirror | Yujiro Nomura, Akihiro Gomi, Ken Ikuma | 2009-01-20 |
| 5611655 | Vacuum process apparatus and vacuum processing method | Yoshio Fukasawa, Shozo Hosoda, Tatsuya Nakagome, Takashi Tozawa, Koji Suzuki +2 more | 1997-03-18 |
| 4329047 | Optical velocity measuring apparatus of non-contact measurement type | Tetsuro Kikuchi, Hideaki Sasaya | 1982-05-11 |