Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5611655 | Vacuum process apparatus and vacuum processing method | Yoshio Fukasawa, Shozo Hosoda, Tatsuya Nakagome, Koji Suzuki, Yasumasa Ishihara +2 more | 1997-03-18 |
| 5554249 | Magnetron plasma processing system | Makoto Hasegawa, Tsuyoshi Saito, Fumihiko Higuchi, Hideaki Amano, Katsunori Naitoh +3 more | 1996-09-10 |
| D365584 | Semiconductor manufacturing device | Tatsuya Nakagome | 1995-12-26 |
| 5407350 | Heat-treatment apparatus | Katsuhiko Iwabuchi, Takeo Suzuki, Satoshi Kagatsume, Hirotsugu Shiraiwa | 1995-04-18 |
| 5224999 | Heat treatment apparatus | Hirotsugu Shiraiwa, Satoshi Kagatsume | 1993-07-06 |