Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5554249 | Magnetron plasma processing system | Makoto Hasegawa, Tsuyoshi Saito, Fumihiko Higuchi, Hideaki Amano, Takashi Tozawa +3 more | 1996-09-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5554249 | Magnetron plasma processing system | Makoto Hasegawa, Tsuyoshi Saito, Fumihiko Higuchi, Hideaki Amano, Takashi Tozawa +3 more | 1996-09-10 |