Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12217973 | Method of etching film and plasma processing apparatus | Takahisa Iwasaki, Kentaro Ishii, Seiji Ide, Chiju Hsieh | 2025-02-04 |
| 11721522 | Plasma processing method and plasma processing apparatus | Kentaro Yamaguchi, Takanori BANSE | 2023-08-08 |
| 11404282 | Method of etching film and plasma processing apparatus | Takahisa Iwasaki, Kentaro Ishii, Seiji Ide, Chiju Hsieh | 2022-08-02 |
| 11367590 | Plasma processing method and plasma processing apparatus | Kentaro Yamaguchi, Takanori BANSE | 2022-06-21 |
| 9564342 | Method for controlling etching in pitch doubling | — | 2017-02-07 |
| 9199095 | Particle beam irradiation system and operating method | Takuya Nomura, Hideaki Nishiuchi | 2015-12-01 |
| 8980111 | Sidewall image transfer method for low aspect ratio patterns | Akiteru Ko | 2015-03-17 |
| 8580077 | Plasma processing apparatus for performing accurate end point detection | Susumu Saito, Syuji NOZAWA | 2013-11-12 |
| 8232207 | Substrate processing method | Kiyohito Ito | 2012-07-31 |
| 8187980 | Etching method, etching apparatus and storage medium | — | 2012-05-29 |
| 7871532 | Plasma processing method and post-processing method | Akitaka Shimizu, Susumu Saito | 2011-01-18 |
| 7662646 | Plasma processing method and plasma processing apparatus for performing accurate end point detection | Susumu Saito, Syuji NOZAWA | 2010-02-16 |