Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12217973 | Method of etching film and plasma processing apparatus | Kosuke Ogasawara, Kentaro Ishii, Seiji Ide, Chiju Hsieh | 2025-02-04 |
| 11404282 | Method of etching film and plasma processing apparatus | Kosuke Ogasawara, Kentaro Ishii, Seiji Ide, Chiju Hsieh | 2022-08-02 |
| 10770268 | Plasma processing method and plasma processing apparatus | Shinya Morikita, Takanori BANSE, Ryosuke Niitsuma, Hiroki Taoka | 2020-09-08 |
| 9202706 | Method of forming pattern and solid-state image sensor device | Hideyuki Hatoh, Yoshisato Oikawa | 2015-12-01 |