Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9460895 | Gas supply method for semiconductor manufacturing apparatus, gas supply system, and semiconductor manufacturing apparatus | Hiroyuki Ogawa | 2016-10-04 |
| 9202706 | Method of forming pattern and solid-state image sensor device | Takahisa Iwasaki, Yoshisato Oikawa | 2015-12-01 |
| 8664117 | Method for manufacturing semiconductor device using anisotropic etching | Katsuyuki Ono, Yusuke Hirayama | 2014-03-04 |