Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10472717 | Gas supply system, plasma processing apparatus, and operation method for plasma processing apparatus | Atsushi Sawachi, Norikazu Sasaki, Yoshiyasu Sato, Kenichi Nogami | 2019-11-12 |
| 10316835 | Method of determining output flow rate of gas output by flow rate controller of substrate processing apparatus | Shinichiro Hayasaka, Toshihiro TSURUTA, Hiroshi Fujii, Junichi Akiba, Naoya Jami +1 more | 2019-06-11 |
| 6105933 | Diaphragm valve structure | Yohichi Kanno, Osamu Uchisawa | 2000-08-22 |
| 5653419 | Diaphragm type high pressure shut-off valve | Osamu Uchisawa | 1997-08-05 |
| 5524865 | Diaphragm valve structure | Osamu Uchisawa, Shigekazu Yamazaki | 1996-06-11 |