Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7744698 | Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD | Masayuki Toda, Masaki Kusuhara, Mikio Doi, Masaru Umeda, Mitsuru Fukagawa +3 more | 2010-06-29 |
| 6931203 | Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD | Masayuki Toda, Masaki Kusuhara, Mikio Doi, Masaru Umeda, Mitsuru Fukagawa +3 more | 2005-08-16 |
| 6769697 | Gasket | Koichi Ishikawa, Toshikatsu MEGURO, Hideo Tsukazaki, Tatsuhito Tanaka | 2004-08-03 |
| 6540840 | Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD | Masayuki Toda, Masaki Kusuhara, Mikio Doi, Masaru Umeda, Mitsuru Fukagawa +3 more | 2003-04-01 |
| 6167323 | Method and system for controlling gas system | Mitsuaki Komino, Yasuhiro Chiba | 2000-12-26 |
| 6157774 | Vapor generating method and apparatus using same | Mitsuaki Komino | 2000-12-05 |
| 6134807 | Drying processing method and apparatus using same | Mitsuaki Komino | 2000-10-24 |
| 6131307 | Method and device for controlling pressure and flow rate | Mitsuaki Komino, Yasuhiro Chiba | 2000-10-17 |
| 6105933 | Diaphragm valve structure | Yohichi Kanno, Jun Yamashima | 2000-08-22 |
| 5653419 | Diaphragm type high pressure shut-off valve | Jun Yamashima | 1997-08-05 |
| 5551477 | Diaphragm-type flow control valve and manual control valve apparatus | Yohichi Kanno, Sigekazu Yamazaki | 1996-09-03 |
| 5524865 | Diaphragm valve structure | Jun Yamashima, Shigekazu Yamazaki | 1996-06-11 |
| 5516366 | Supply control system for semiconductor process gasses | Yohichi Kanno, Kohichi Murakami, Tadahiro Ohmi | 1996-05-14 |
| 4828219 | Metal diaphragm valve | Tadahiro Ohmi, Yohichi Kanno, Kazuhiko Sato | 1989-05-09 |