Issued Patents All Time
Showing 25 most recent of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11335783 | Method of making semiconductor ferroelectric memory element, and semiconductor ferroelectric memory transistor | Shigeki Sakai, Mitsue Takahashi, Masaki Kusuhara, Masayuki Toda, Yoshikazu Sasaki | 2022-05-17 |
| 11069713 | Semiconductor memory element, other elements, and their production methods | Mitsue Takahashi, Shigeki Sakai, Masaki Kusuhara, Masayuki Toda, Yoshikazu Sasaki | 2021-07-20 |
| 10686043 | Method of making semiconductor ferroelectric memory element, and semiconductor ferroelectric memory transistor | Shigeki Sakai, Mitsue Takahashi, Masaki Kusuhara, Masayuki Toda, Yoshikazu Sasaki | 2020-06-16 |
| 9885113 | Vaporizer, center rod used therein, and method for vaporizing material carried by carrier gas | Masayuki Toda | 2018-02-06 |
| 9818869 | Ferroelectric device and method of its manufacture | Shigeki Sakai, Mitsue Takahashi, Masaki Kusuhara, Masayuki Toda | 2017-11-14 |
| 9644264 | Evaporation method and film deposition method | Masayuki Toda, Masaki Kusuhara, Mitsuru Fukagawa | 2017-05-09 |
| 9108120 | Method for cooling and dispersing a carrier gas, and method for vaporizing a carrier gas | Masayuki Toda | 2015-08-18 |
| 9020332 | Center rod for use in the carburetor or carburetor for MOCVD | Masayuki Toda | 2015-04-28 |
| 8897627 | Carburetor, carburetor for MOCVD using same, center rod for use in the carburetor or carburetor for MOCVD, method for dispersing carrier gas, and method for vaporizing carrier gas | Masayuki Toda | 2014-11-25 |
| 8486196 | Vaporizing apparatus and film forming apparatus provided with vaporizing apparatus | Masayuki Toda, Masaki Kusuhara, Mitsuru Fukagawa | 2013-07-16 |
| 7744698 | Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD | Masayuki Toda, Masaki Kusuhara, Mikio Doi, Mitsuru Fukagawa, Yoichi Kanno +3 more | 2010-06-29 |
| 7704019 | Levitation transportation device and levitation transportation method | Masayuki Toda | 2010-04-27 |
| 7673856 | Vaporizer and various devices using the same and an associated vaporizing method | Masayuki Toda, Masaki Kusuhara, Mitsuru Fukagawa | 2010-03-09 |
| 7246796 | Carburetor, various types of devices using the carburetor, and method of vaporization | Masayuki Toda, Masaki Kusuhara, Mitsuru Fukagawa | 2007-07-24 |
| 6931203 | Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD | Masayuki Toda, Masaki Kusuhara, Mikio Doi, Mitsuru Fukagawa, Yoichi Kanno +3 more | 2005-08-16 |
| 6540840 | Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD | Masayuki Toda, Masaki Kusuhara, Mikio Doi, Mitsuru Fukagawa, Yoichi Kanno +3 more | 2003-04-01 |
| 6447217 | Substrate transfer device and operating method thereof | Masayuki Toda, Masaki Kusuhara, Michio Yagai | 2002-09-10 |
| 6398464 | Air stream transfer apparatus | Michio Yagai, Masayuki Toda | 2002-06-04 |
| 6394733 | Substrate body transfer apparatus | Masayuki Toda, Masaki Kusuhara, Michio Yagai | 2002-05-28 |
| 6315501 | Air stream particulate collecting transfer apparatus | Michio Yagai, Masayuki Toda | 2001-11-13 |
| 6074538 | Thin film forming equipment | Tadahiro Ohmi, Tadashi Shibata | 2000-06-13 |
| 5989722 | Reduced pressure device and method of making | Tadahiro Ohmi | 1999-11-23 |
| 5921744 | Wafer carrying device and wafer carrying method | Masayuki Toda, Takashi Onoda, Tadahiro Ohmi, Yoichi Kanno | 1999-07-13 |
| 5854116 | Semiconductor apparatus | Tadahiro Ohmi, Tadashi Shibata | 1998-12-29 |
| 5683072 | Thin film forming equipment | Tadahiro Ohmi, Tadashi Shibata | 1997-11-04 |