Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7744698 | Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD | Masayuki Toda, Masaki Kusuhara, Mikio Doi, Masaru Umeda, Mitsuru Fukagawa +3 more | 2010-06-29 |
| 6931203 | Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD | Masayuki Toda, Masaki Kusuhara, Mikio Doi, Masaru Umeda, Mitsuru Fukagawa +3 more | 2005-08-16 |
| 6540840 | Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD | Masayuki Toda, Masaki Kusuhara, Mikio Doi, Masaru Umeda, Mitsuru Fukagawa +3 more | 2003-04-01 |
| 5921744 | Wafer carrying device and wafer carrying method | Masayuki Toda, Takashi Onoda, Tadahiro Ohmi, Masaru Umeda | 1999-07-13 |
| 5518360 | Wafer carrying device and wafer carrying method | Masayuki Toda, Takashi Onoda, Tadahiro Ohmi, Masaru Umeda | 1996-05-21 |