Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11335783 | Method of making semiconductor ferroelectric memory element, and semiconductor ferroelectric memory transistor | Shigeki Sakai, Mitsue Takahashi, Masayuki Toda, Masaru Umeda, Yoshikazu Sasaki | 2022-05-17 |
| 11069713 | Semiconductor memory element, other elements, and their production methods | Mitsue Takahashi, Shigeki Sakai, Masayuki Toda, Masaru Umeda, Yoshikazu Sasaki | 2021-07-20 |
| 10686043 | Method of making semiconductor ferroelectric memory element, and semiconductor ferroelectric memory transistor | Shigeki Sakai, Mitsue Takahashi, Masayuki Toda, Masaru Umeda, Yoshikazu Sasaki | 2020-06-16 |
| 9831069 | CVD apparatus and method for forming CVD film | — | 2017-11-28 |
| 9818869 | Ferroelectric device and method of its manufacture | Shigeki Sakai, Mitsue Takahashi, Masayuki Toda, Masaru Umeda | 2017-11-14 |
| 9644264 | Evaporation method and film deposition method | Masayuki Toda, Masaru Umeda, Mitsuru Fukagawa | 2017-05-09 |
| 8486196 | Vaporizing apparatus and film forming apparatus provided with vaporizing apparatus | Masayuki Toda, Masaru Umeda, Mitsuru Fukagawa | 2013-07-16 |
| 7744698 | Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD | Masayuki Toda, Mikio Doi, Masaru Umeda, Mitsuru Fukagawa, Yoichi Kanno +3 more | 2010-06-29 |
| 7673856 | Vaporizer and various devices using the same and an associated vaporizing method | Masayuki Toda, Masaru Umeda, Mitsuru Fukagawa | 2010-03-09 |
| 7246796 | Carburetor, various types of devices using the carburetor, and method of vaporization | Masayuki Toda, Masaru Umeda, Mitsuru Fukagawa | 2007-07-24 |
| 7140201 | Method for producing silica particles | Kunio Sugiyama, Shuichi TADA, Jinichi Omi, Tadahiro Nakada, Hiroshi Morita +3 more | 2006-11-28 |
| 6931203 | Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD | Masayuki Toda, Mikio Doi, Masaru Umeda, Mitsuru Fukagawa, Yoichi Kanno +3 more | 2005-08-16 |
| 6553787 | Method for manufacturing quartz glass crucible | Kazuhiro Akiho, Hiroyuki Watanabe, Tomoyasu Uno | 2003-04-29 |
| 6540840 | Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD | Masayuki Toda, Mikio Doi, Masaru Umeda, Mitsuru Fukagawa, Yoichi Kanno +3 more | 2003-04-01 |
| 6447217 | Substrate transfer device and operating method thereof | Masayuki Toda, Masaru Umeda, Michio Yagai | 2002-09-10 |
| 6394733 | Substrate body transfer apparatus | Masayuki Toda, Masaru Umeda, Michio Yagai | 2002-05-28 |
| 6209553 | Method of and apparatus for washing photomask and washing solution for photomask | Yoshikazu Nagamura, Nobuyuki Yoshioka, Koji Yamanaka | 2001-04-03 |
| 4777970 | Vapor drying apparatus | — | 1988-10-18 |
| 4736758 | Vapor drying apparatus | — | 1988-04-12 |
| 4641227 | Solar simulator | — | 1987-02-03 |