Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861786 | Semiconductor device having a multilayer structure | Takashi Ipposhi, Katsumi Eikyu | 2020-12-08 |
| 8156451 | Method of manufacturing photomask | Shogo Narukawa | 2012-04-10 |
| 7926010 | Method of determining defects in photomask | Shogo Narukawa | 2011-04-12 |
| 7771904 | Photomask, and method and apparatus for producing the same | Kouji Tange, Kouki Hayashi, Hidehiro Ikeda | 2010-08-10 |
| 7585599 | Photomask, and method and apparatus for producing the same | Kouji Tange, Kouki Hayashi, Hidehiro Ikeda | 2009-09-08 |
| 7582397 | Photomask, and method and apparatus for producing the same | Kouji Tange, Kouki Hayashi, Hidehiro Ikeda | 2009-09-01 |
| 7264905 | Photomask, and method and apparatus for producing the same | Kouji Tange, Kouki Hayashi, Hidehiro Ikeda | 2007-09-04 |
| 7077915 | Method of and apparatus for washing photomask and washing solution for photomask | Nobuyuki Yoshioka, Koji Yamanaka, Hozumi Usui | 2006-07-18 |
| 7001470 | Cleaning process for photomasks | Koji Tange, Kunihiro Hosono, Yasutaka Kikuchi, Yuki Oomasa, Koichi Kido | 2006-02-21 |
| 6877151 | Photomask visual inspection system | — | 2005-04-05 |
| 6740896 | Sensitivity adjusting method for pattern inspection apparatus | — | 2004-05-25 |
| 6340543 | Photomask, manufacturing method thereof, and semiconductor device | Kazuhito Suzuki, Kunihiro Hosono, Nobuyuki Yoshioka | 2002-01-22 |
| 6277205 | Method and apparatus for cleaning photomask | Nobuyuki Yoshioka, Hozumi Usui, Koji Yamanaka | 2001-08-21 |
| 6209553 | Method of and apparatus for washing photomask and washing solution for photomask | Nobuyuki Yoshioka, Koji Yamanaka, Masaki Kusuhara | 2001-04-03 |
| 6071376 | Method and apparatus for cleaning photomask | Nobuyuki Yoshioka, Hozumi Usui, Koji Yamanaka | 2000-06-06 |