Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7077915 | Method of and apparatus for washing photomask and washing solution for photomask | Yoshikazu Nagamura, Nobuyuki Yoshioka, Koji Yamanaka | 2006-07-18 |
| 6277205 | Method and apparatus for cleaning photomask | Yoshikazu Nagamura, Nobuyuki Yoshioka, Koji Yamanaka | 2001-08-21 |
| 6071376 | Method and apparatus for cleaning photomask | Yoshikazu Nagamura, Nobuyuki Yoshioka, Koji Yamanaka | 2000-06-06 |